CPC C23F 1/02 (2013.01) [C22C 5/04 (2013.01); C23C 14/16 (2013.01); C23C 14/5873 (2013.01); G06F 3/015 (2013.01)] | 8 Claims |
1. A method for fabricating a Pt nanorod electrode array sensor device, comprising:
forming planar metal electrodes on a flexible film;
co-depositing Pt alloy on the planar metal electrodes via physical vapor deposition;
dealloying the Pt alloy to etch Pt nanorods from the deposited Pt alloy.
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