US 12,065,745 B2
Porous platinum nanorod electrode array flexible sensor devices and fabrication
Shadi A. Dayeh, San Diego, CA (US); and Mehran Ganji, San Diego, CA (US)
Assigned to The Regents of the University of California, Oakland, CA (US)
Appl. No. 17/291,236
Filed by The Regents of the University of California, Oakland, CA (US)
PCT Filed Nov. 7, 2019, PCT No. PCT/US2019/060230
§ 371(c)(1), (2) Date May 4, 2021,
PCT Pub. No. WO2020/097305, PCT Pub. Date May 14, 2020.
Claims priority of provisional application 62/757,264, filed on Nov. 8, 2018.
Prior Publication US 2021/0371987 A1, Dec. 2, 2021
Int. Cl. C23F 1/02 (2006.01); C22C 5/04 (2006.01); C23C 14/16 (2006.01); C23C 14/58 (2006.01); G06F 3/01 (2006.01)
CPC C23F 1/02 (2013.01) [C22C 5/04 (2013.01); C23C 14/16 (2013.01); C23C 14/5873 (2013.01); G06F 3/015 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A method for fabricating a Pt nanorod electrode array sensor device, comprising:
forming planar metal electrodes on a flexible film;
co-depositing Pt alloy on the planar metal electrodes via physical vapor deposition;
dealloying the Pt alloy to etch Pt nanorods from the deposited Pt alloy.