US 12,065,726 B2
Mask assembly and manufacturing method thereof
Leifang Xiao, Beijing (CN); Guoqiang Ma, Beijing (CN); Peng Xu, Beijing (CN); and Jiancheng Zhao, Beijing (CN)
Assigned to CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Sichuan (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Appl. No. 17/309,828
Filed by CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Sichuan (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed Dec. 29, 2020, PCT No. PCT/CN2020/140567
§ 371(c)(1), (2) Date Jun. 21, 2021,
PCT Pub. No. WO2021/147624, PCT Pub. Date Jul. 29, 2021.
Claims priority of application No. 202010076164.8 (CN), filed on Jan. 22, 2020.
Prior Publication US 2022/0307121 A1, Sep. 29, 2022
Int. Cl. C23C 14/04 (2006.01); B23K 26/20 (2014.01)
CPC C23C 14/042 (2013.01) [B23K 26/20 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A mask assembly, including:
a frame;
a mask provided with a mask area and a plurality of rectangular connection areas positioned on opposite sides of the mask area; and
a plurality of connection parts in each one of the plurality of rectangular connection areas, wherein the plurality of connection parts in each one of the plurality of rectangular connection areas consist of a plurality of first connection parts, at least one second connection part and at least one third connection part, and wherein each of the plurality of connection parts is formed by laser irradiation on the mask,
wherein the plurality of first connection parts in each one of the plurality of rectangular connection areas are arranged in M rows and N columns, each row includes some of the plurality of first connection parts, each column includes at least one first connection part of the plurality of first connection parts, and in the same one of the plurality of rectangular connection areas, the first connection parts of any two adjacent rows are arranged in a staggered manner, where each of M and N is an integer larger than 1, and the mask is fixed to the frame via the plurality of first connection parts,
wherein in each one of the plurality of rectangular connection areas, the at least one second connection part is disposed in the same column as the first connection part of the first column, and each second connection part is disposed in the same row as the first connection parts of one of the rows; wherein the at least one third connection part is disposed in the same column as the first connection part of the Nth column, and each third connection part is disposed in the same row as the first connection parts of one of the rows;
wherein in each one of the plurality of rectangular connection areas, the first connection parts of the first column and the at least one second connection part are arranged into M rows, and the first connection parts of the Nth column and the at least one third connection part are arranged into M rows;
wherein the row or rows containing the at least one second connection part is different than the row or rows containing the at least one third connection part; and
wherein the middle columns does not contain any of the second connection part and the third connection part.