US 12,065,453 B2
Lanthanoid compound, lanthanoid-containing thin film and formation of lanthanoid-containing thin film using the lanthanoid compound
Christian Dussarrat, Tokyo (JP); Takashi Ono, Yokosuka (JP); and Tomohiro Seki, Yokosuka (JP)
Assigned to L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris (FR)
Appl. No. 16/964,811
Filed by L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris (FR)
PCT Filed Jan. 22, 2019, PCT No. PCT/EP2019/051459
§ 371(c)(1), (2) Date Jul. 24, 2020,
PCT Pub. No. WO2019/145277, PCT Pub. Date Aug. 1, 2019.
Claims priority of application No. 2018-011070 (JP), filed on Jan. 26, 2018.
Prior Publication US 2021/0061833 A1, Mar. 4, 2021
Int. Cl. C07F 17/00 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H01L 21/02 (2006.01)
CPC C07F 17/00 (2013.01) [C23C 16/34 (2013.01); C23C 16/40 (2013.01); C23C 16/45553 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A lanthanoid compound represented by the following general formula (2)
Sm(R2xCp)2(A)y  (2)
wherein:
R2 is independently normal propyl, isopropyl, normal butyl, secondary butyl, isobutyl, or tertiary amyl;
Cp is cyclopentadienyl;
A is a linear or cyclic hydrocarbon containing oxygen, sulfur, phosphorus, or nitrogen;
x is an integer of 2 to 3; and
y is 0 to 2.