	US 12,065,381 B2
	Temperature-stable, low-dielectric constant material with an ultra-low loss tangent
Michael David Hill, Frederick, MD (US); and Srinivas Polisetty, Frederick, MD (US)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Jul. 10, 2020, as Appl. No. 16/925,899.
Claims priority of provisional application 62/873,039, filed on Jul. 11, 2019.
Prior Publication US 2021/0032167 A1, Feb. 4, 2021
Int. Cl. C04B 35/478 (2006.01); C04B 35/44 (2006.01); C04B 35/626 (2006.01); C04B 35/64 (2006.01); H01P 1/36 (2006.01); H01P 1/38 (2006.01)

CPC C04B 35/478 (2013.01) [C04B 35/44 (2013.01); C04B 35/62645 (2013.01); C04B 35/64 (2013.01); H01P 1/36 (2013.01); H01P 1/38 (2013.01); C04B 2235/3222 (2013.01); C04B 2235/3234 (2013.01); C04B 2235/3267 (2013.01); C04B 2235/656 (2013.01); C04B 2235/763 (2013.01)]

20 Claims

1. A temperature-stable, low-dielectric constant material formed out of a ZnO—Al₂O₃—TiO₂ternary system, the material comprising:

a first phase formed out of the ternary system, the first phase being at least one spinel; and

a second phase thermodynamically compatible with the first phase and formed out of the ternary system, the second phase being rutile, the material having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, the ternary system including about 0.5 to about 0.65 mole fraction AlO_1.5.