US 12,064,846 B2
Formulations for high porosity chemical mechanical polishing pads with high hardness and CMP pads made therewith
Bryan E. Barton, Lincoln University, PA (US); Annette M. Crevasse, Elkton, MD (US); Teresa Brugarolas Brufau, Philadelphia, PA (US); Vere O. Archibald, North Wales, PA (US); and Michael E. Mills, Bear, DE (US)
Assigned to Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, DE (US)
Filed by Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, DE (US)
Filed on Jan. 21, 2021, as Appl. No. 17/154,807.
Prior Publication US 2022/0226961 A1, Jul. 21, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. B24B 37/24 (2012.01); B24B 37/22 (2012.01); C08G 18/10 (2006.01); C08G 18/12 (2006.01); C08G 18/18 (2006.01); C08G 18/24 (2006.01); C08G 18/32 (2006.01); C08G 18/48 (2006.01); C08G 18/66 (2006.01); C08G 18/76 (2006.01); C09D 175/04 (2006.01); C09D 175/08 (2006.01); H01L 21/306 (2006.01)
CPC B24B 37/24 (2013.01) [B24B 37/22 (2013.01); C08G 18/10 (2013.01); C08G 18/12 (2013.01); C08G 18/1808 (2013.01); C08G 18/246 (2013.01); C08G 18/3203 (2013.01); C08G 18/3206 (2013.01); C08G 18/3225 (2013.01); C08G 18/4825 (2013.01); C08G 18/4854 (2013.01); C08G 18/6607 (2013.01); C08G 18/6674 (2013.01); C08G 18/76 (2013.01); C08G 18/7671 (2013.01); C09D 175/04 (2013.01); C09D 175/08 (2013.01); C08G 2110/00 (2021.01); H01L 21/30625 (2013.01)] 10 Claims
 
1. A chemical mechanical (CMP) polishing pad for polishing a substrate chosen from at least one of a magnetic substrate, an optical substrate and a semiconductor substrate, the polishing pad comprising a polishing layer adapted for polishing the substrate, the polishing layer being a polyurethane, the polyurethane is a product of an organic solvent free two-component reaction mixture comprising (i) a liquid aromatic isocyanate component comprising one or more aromatic diisocyanates or a linear aromatic isocyanate-terminated urethane prepolymer having an unreacted isocyanate (NCO) concentration of from 18 to 40 wt. %, based on the total solids weight of the aromatic isocyanate component, and (ii) a liquid polyol component comprising a) one or more polymeric polyols, b) from 15 to 36 wt. %, based on the total weight of the liquid polyol component, of one or more small chain difunctional polyols having from 2 to 6 carbon atoms, c) from 0 to 25 wt. %, based on the total weight of the liquid polyol component, of a liquid aromatic diamine which is a liquid at standard pressure and at 40° C., and d) an amount of water or CO2-amine adduct sufficient to reduce the density of a CMP polishing pad made from the two-component reaction mixture to from 0.2 to 0.50 g/mL, wherein the reaction mixture comprises 60 to 75 wt. % of hard segment materials, based on the total weight of the reaction mixture, wherein the CMP polishing layer has a Shore DO (15 second) hardness of from 40 to 80, and with densities of from 0.2 to 0.50 g/mL.