US 11,737,366 B2
Layered sensor apparatus and method of making same
Karl E. Sprentall, Scottsdale, AZ (US); Trevor Polidore, Somerville, MA (US); Robert Mone, Stoughton, MA (US); Michael Lunt, Scotland, CT (US); and William Kwan, Medford, MA (US)
Assigned to ROGERS CORPORATION, Chandler, AZ (US)
Filed by Rogers Corporation, Chandler, AZ (US)
Filed on Feb. 23, 2018, as Appl. No. 15/903,204.
Claims priority of provisional application 62/465,239, filed on Mar. 1, 2017.
Prior Publication US 2018/0254405 A1, Sep. 6, 2018
Int. Cl. H01L 41/113 (2006.01); H10N 30/30 (2023.01); G01L 1/14 (2006.01); H02N 1/04 (2006.01); G01L 1/16 (2006.01); G01L 5/00 (2006.01); H02N 1/08 (2006.01); H10N 30/50 (2023.01); H10N 30/057 (2023.01); H10N 30/071 (2023.01); H10N 30/079 (2023.01); H10N 30/857 (2023.01)
CPC H10N 30/302 (2023.02) [G01L 1/14 (2013.01); G01L 1/142 (2013.01); G01L 1/16 (2013.01); G01L 5/0052 (2013.01); H02N 1/04 (2013.01); H02N 1/08 (2013.01); H10N 30/057 (2023.02); H10N 30/071 (2023.02); H10N 30/079 (2023.02); H10N 30/50 (2023.02); H10N 30/857 (2023.02)] 24 Claims
OG exemplary drawing
 
1. A sensor apparatus, comprising:
a first of a plurality of layers comprising a top layer, a bottom layer, and at least one intermediate layer, the at least one intermediate layer comprising an electrical conductor layer, each of the top layer, the bottom layer, and the at least one intermediate layer is disposed in direct intimate contact with a respective adjacent layer, wherein direct intimate contact includes a physical bond at the respective interface;
a second of the plurality of layers disposed in direct intimate contact with the first plurality of layers such that the bottom layer of the second plurality of layers is disposed in direct contact with the top layer of the first plurality of layers;
the first and second plurality of layers configured to produce productive of a piezoelectric voltage absent of an external current producing device and in response to being deformed; and
the first and second plurality of layers configured to produce productive of a change in capacitance in response to being deformed.