US 11,737,176 B2
Low profile heater apparatus and method of manufacture
Jeffrey D. Kiernan, Frederick, CO (US)
Assigned to MKS Instruments, Inc.
Filed by MKS Instruments, Inc., Andover, MA (US)
Filed on Mar. 19, 2020, as Appl. No. 16/823,715.
Claims priority of provisional application 62/825,777, filed on Mar. 28, 2019.
Prior Publication US 2020/0314967 A1, Oct. 1, 2020
Int. Cl. F16L 53/00 (2018.01); H05B 3/03 (2006.01); H05B 3/06 (2006.01); H05B 3/18 (2006.01); H05B 3/58 (2006.01); H05B 3/36 (2006.01); F16L 53/38 (2018.01); H05B 1/02 (2006.01); H05B 3/34 (2006.01); F16L 53/30 (2018.01); F16L 53/35 (2018.01)
CPC H05B 3/58 (2013.01) [F16L 53/38 (2018.01); H05B 1/023 (2013.01); H05B 3/03 (2013.01); H05B 3/06 (2013.01); H05B 3/36 (2013.01); F16L 53/30 (2018.01); F16L 53/35 (2018.01); H05B 3/18 (2013.01); H05B 3/34 (2013.01); H05B 2203/016 (2013.01); H05B 2203/017 (2013.01); H05B 2203/033 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A low-profile heater apparatus, comprising:
at least one lower assembly, including at least one first sheet, at least one heating sheet including at least one heating element formed on one or more dielectric sheets, at least one intermediate sheet, and one or more electrical leads in electrical communication with the at least one heating element and configured to supply electrical power to the at least one heating element;
at least one upper assembly, including at least one top sheet with one or more passages formed therein, the one or more passages configured to allow at least one lead sleeve to traverse therethrough, the at least one lead sleeve and at least one lead sleeve passage extending therethrough, the at least one lead sleeve passage configured to accept the one or more electrical leads from the at least one lower assembly to pass therethrough;
at least one heater body, the at least one heater body including the at least one lower assembly and the at least one upper assembly coupled together with one or more perimeter coupling features; and
at least one strain relief structure, the at least one strain relief structure including one or more split sleeves extending from the at least one lead sleeve, wherein the one or more split sleeves are fastened to the at least one top sheet by one or more split sleeve coupling features configured to securely attach the one or more split sleeves to the at least one top sheet, wherein the at least one strain relief structure is configured to prevent damage to the one or more electrical leads.