US 11,735,575 B2
Bonding of bridge to multiple semiconductor chips
Akihiro Horibe, Yokohama (JP); Takahito Watanabe, Yokohama (JP); Toyohiro Aoki, Yokohama (JP); Takashi Hisada, Hachiouji (JP); and Hiroyuki Mori, Yasu (JP)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on May 27, 2021, as Appl. No. 17/303,333.
Prior Publication US 2022/0384412 A1, Dec. 1, 2022
Int. Cl. H01L 23/00 (2006.01); H01L 23/538 (2006.01); H01L 25/00 (2006.01)
CPC H01L 25/50 (2013.01) [H01L 23/538 (2013.01); H01L 24/75 (2013.01); H01L 24/81 (2013.01); H01L 24/83 (2013.01); H01L 24/92 (2013.01); H01L 2224/75101 (2013.01); H01L 2224/75755 (2013.01); H01L 2224/75981 (2013.01); H01L 2224/81054 (2013.01); H01L 2224/81136 (2013.01); H01L 2224/83951 (2013.01); H01L 2224/92125 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An apparatus for interconnecting a first chip and a second chip, comprising:
a bridge member for interconnecting the first chip and the second chip, each of the first chip and the second chip having a first surface including a first set of terminals and a second surface opposite to the first surface;
a chip handler for handling the first chip and the second chip, wherein the chip handler has an opening and at least one support surface for supporting the first surfaces of the first chip and the second chip when the first chip and the second chip are mounted to the chip handler;
a chip support member for supporting the first chip and the second chip from the second surfaces;
a bridge handler for inserting the bridge member through the opening of the chip handler and placing the bridge member onto the first sets of terminals of the first chip and the second chip, wherein the chip handler, the chip support member and the bridge handler provide a chamber space; and
a gas supplier for suppling a reduction gas into the chamber space to clean at least one of the first sets of terminals of the first chip and the second chip and terminals of the bridge member.