US 11,735,458 B2
Ceramic mixture paste, porous body, electrostatic chuck, and substrate fixing device
Tomotake Minemura, Nagano (JP)
Assigned to SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano (JP)
Filed by SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano (JP)
Filed on May 29, 2018, as Appl. No. 15/990,914.
Claims priority of application No. 2017-143947 (JP), filed on Jul. 25, 2017.
Prior Publication US 2019/0035667 A1, Jan. 31, 2019
Int. Cl. H01L 21/683 (2006.01); C04B 38/06 (2006.01); C04B 35/10 (2006.01); H01L 21/687 (2006.01); C04B 35/111 (2006.01); H01J 37/32 (2006.01)
CPC H01L 21/6833 (2013.01) [C04B 35/10 (2013.01); C04B 35/111 (2013.01); C04B 38/067 (2013.01); C04B 38/0695 (2013.01); H01L 21/6831 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3208 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3418 (2013.01); C04B 2235/5427 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/77 (2013.01); C04B 2235/9615 (2013.01); H01J 37/32715 (2013.01); H01J 2237/334 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A ceramic mixture paste comprising:
oxide ceramic particles;
burn-off particles that are burned off at a temperature lower than a firing temperature of the oxide ceramic particles; and
a firing aid that melts at a temperature lower than the firing temperature,
wherein the oxide ceramic particles, the burn-off particles, and the firing aid are mixed in paste form, and
a ratio of a volume of the burn-off particles to a volume of the oxide ceramic particles is more than 0% and less than or equal to 20%.