CPC H01L 21/6833 (2013.01) [C04B 35/10 (2013.01); C04B 35/111 (2013.01); C04B 38/067 (2013.01); C04B 38/0695 (2013.01); H01L 21/6831 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3208 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3418 (2013.01); C04B 2235/5427 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/77 (2013.01); C04B 2235/9615 (2013.01); H01J 37/32715 (2013.01); H01J 2237/334 (2013.01)] | 6 Claims |
1. A ceramic mixture paste comprising:
oxide ceramic particles;
burn-off particles that are burned off at a temperature lower than a firing temperature of the oxide ceramic particles; and
a firing aid that melts at a temperature lower than the firing temperature,
wherein the oxide ceramic particles, the burn-off particles, and the firing aid are mixed in paste form, and
a ratio of a volume of the burn-off particles to a volume of the oxide ceramic particles is more than 0% and less than or equal to 20%.
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