US 11,735,454 B2
Transfer device and ceiling carrier
Makoto Kobayashi, Ise (JP); and Keiichiro Suriki, Ise (JP)
Assigned to MURATA MACHINERY, LTD., Kyoto (JP)
Appl. No. 17/433,064
Filed by MURATA MACHINERY, LTD., Kyoto (JP)
PCT Filed Dec. 20, 2019, PCT No. PCT/JP2019/050215
§ 371(c)(1), (2) Date Aug. 23, 2021,
PCT Pub. No. WO2020/174846, PCT Pub. Date Sep. 3, 2020.
Claims priority of application No. 2019-033197 (JP), filed on Feb. 26, 2019.
Prior Publication US 2022/0157631 A1, May 19, 2022
Int. Cl. H01L 21/677 (2006.01)
CPC H01L 21/67769 (2013.01) [H01L 21/6773 (2013.01); H01L 21/67724 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A transfer device to move an article along one direction and support the article from below, the article having a center of gravity position deviating from a center position between a first end and a second end in the one direction to the first end side, the transfer device comprising:
a controller configured or programmed to perform at least one of:
a first control to make a maximum acceleration when moving the article to the first end side smaller than a maximum acceleration when moving the article to the second end side;
a second control to make a maximum deceleration when moving the article to the first end side greater than a maximum deceleration when moving the article to the second end side;
a third control to make an absolute value of the maximum deceleration when moving the article to the first end side greater than an absolute value of the maximum acceleration; or
a fourth control to make an absolute value of the maximum acceleration when moving the article to the second end side greater than an absolute value of the maximum deceleration; wherein
the article is a container; and
the controller is configured or programmed to selectively perform the at least one of the first control, the second control, the third control, or the fourth control based on whether the article is moved to the first end side or the second end side, and whether the article is moved onto or moved from a placement section.