US 11,735,449 B2
Substrate storage container
Kazumasa Onuki, Niigata (JP); Hiroshi Mimura, Saitama (JP); Junya Toda, Saitama (JP); and Takashi Suda, Niigata (JP)
Assigned to Shin-Etsu Polymer Co., Ltd., Tokyo (JP)
Appl. No. 16/763,990
Filed by Shin-Etsu Polymer Co., Ltd., Tokyo (JP)
PCT Filed Oct. 1, 2018, PCT No. PCT/JP2018/036714
§ 371(c)(1), (2) Date May 14, 2020,
PCT Pub. No. WO2019/097862, PCT Pub. Date May 23, 2019.
Claims priority of application No. 2017-221126 (JP), filed on Nov. 16, 2017.
Prior Publication US 2020/0286761 A1, Sep. 10, 2020
Int. Cl. H01L 21/673 (2006.01); B65D 85/30 (2006.01); H01L 21/68 (2006.01)
CPC H01L 21/67383 (2013.01) [B65D 85/30 (2013.01); H01L 21/6732 (2013.01); H01L 21/67346 (2013.01); H01L 21/67369 (2013.01); H01L 21/67386 (2013.01); H01L 21/68 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A substrate storage container, comprising:
a container main body having an opening at a front side, a support portion for supporting a substrate in the interior thereof, a plurality of substrate receiving portions located more toward the side of a rear wall side than the support portion; and
a lid having a pressing member with a plurality of substrate pressing portions for pressing the substrate;
the substrate storage container supporting the substrate by lifting the substrate from the support portion with the plurality of substrate pressing portions and the plurality of substrate receiving portions when the lid is attached to the container main body, and supporting the substrate with the support portion when the lid is removed from the container main body;
the plurality of substrate pressing portions being present within a range of greater than 0 mm and less than or equal to 80 mm in the horizontal direction from a vertical center line that passes through the center of the container main body when the lid is viewed from the front; and
a position corresponding to the center of the substrate when the substrate is stored in the substrate storage container being designated as the center of the container main body,
wherein the plurality of the substrate receiving portions are located horizontally symmetrically with respect to the vertical center line within a range of greater than or equal to 20° and less than or equal to 30° in the horizontal direction from the center of the container main body when the rear wall is viewed from the front,
wherein the pressing member comprises an arch shape arm extending the horizontal direction and a pair of elastic arms supporting the arch shape arm at both end portions of the arch shape arm, the pressing member supported only from both ends thereof, and wherein the plurality of substrate pressing portions consists of a pair of substrate pressing portions located symmetrically in the both end portions of the arch shape arm.