US 11,735,447 B2
Enhanced process and hardware architecture to detect and correct realtime product substrates
Kartik Santhanam, Sunnyvale, CA (US); Kartik Shah, Saratoga, CA (US); Wolfgang Aderhold, Santa Clara, CA (US); Martin Hilkene, Gilroy, CA (US); and Stephen Moffatt, St. Brelade (JE)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 20, 2020, as Appl. No. 17/75,321.
Prior Publication US 2022/0122865 A1, Apr. 21, 2022
Int. Cl. H01L 21/67 (2006.01); G05B 19/406 (2006.01); G06N 20/00 (2019.01)
CPC H01L 21/67276 (2013.01) [G05B 19/406 (2013.01); G06N 20/00 (2019.01); G05B 2219/45031 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A processing tool, comprising:
a chamber;
a mass flow controller coupled to the chamber;
a mass flow meter coupled to the chamber;
a pressure gauge coupled to the chamber;
a plurality of witness sensors integrated with the chamber;
a drift detection module, wherein data from the plurality of witness sensors is provided to the drift detection module as input data from one or both of the mass flow controller or the mass flow meter; and
a dashboard for displaying output data from the drift detection module.