CPC H01J 37/244 (2013.01) [H01J 37/20 (2013.01); H01J 37/22 (2013.01); H01J 37/26 (2013.01)] | 11 Claims |
1. A charged particle beam apparatus comprising:
a sample stage comprising an electrostatic chuck configured to hold a measurement sample and a holding base disposed apart from the electrostatic chuck;
a charged particle beam source configured to irradiate the measurement sample with a charged particle beam;
a detector configured to detect a charged particle emitted by irradiation with the charged particle beam;
a foreign matter observation sample bonded to the holding base and disposed on the sample stage adjacent to the measurement sample; and
an optical microscope configured to observe a foreign matter on the foreign matter observation sample.
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