CPC G03F 7/70625 (2013.01) [G01B 9/04 (2013.01); G03F 1/84 (2013.01); G03F 1/86 (2013.01); G06T 7/12 (2017.01); G06T 2207/10061 (2013.01); G06T 2207/20168 (2013.01); G06T 2207/30148 (2013.01)] | 18 Claims |
1. A non-transitory computer readable medium storing a set of instructions that are executable by one or more processors of an apparatus to cause the apparatus to perform a method for determining an edge position relating to an edge of a feature, the method comprising:
determining a reference signal from an inspection image by applying a 1-dimensional low-pass filter to the inspection image; and
determining the edge position based on a matched edge-contour and a threshold characteristic of the inspection image, the matched edge-contour comprising a matched estimate of the edge position based on the reference signal.
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