US 11,733,607 B2
Metal plate for producing vapor deposition masks, inspection method for metal plates, production method for metal plates, vapor deposition mask, vapor deposition mask device, and production method for vapor deposition masks
Chikao Ikenaga, Tokyo (JP); Hideyuki Okamoto, Tokyo (JP); Masato Ushikusa, Tokyo (JP); Chiaki Hatsuta, Tokyo (JP); Hiroki Oka, Tokyo (JP); and Sachiyo Matsuura, Tokyo (JP)
Assigned to Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed by Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed on Sep. 24, 2019, as Appl. No. 16/580,524.
Application 16/580,524 is a continuation of application No. PCT/JP2018/041919, filed on Nov. 13, 2018.
Claims priority of application No. 2017-219369 (JP), filed on Nov. 14, 2017; application No. 2017-249744 (JP), filed on Dec. 26, 2017; and application No. 2018-002932 (JP), filed on Jan. 11, 2018.
Prior Publication US 2020/0019056 A1, Jan. 16, 2020
Int. Cl. G03F 7/00 (2006.01); G03F 7/20 (2006.01); C23C 14/04 (2006.01); B05C 21/00 (2006.01); B21B 1/22 (2006.01); C23C 14/24 (2006.01); C25D 1/04 (2006.01); C25D 3/56 (2006.01); C22C 38/08 (2006.01); C21D 6/00 (2006.01); C21D 8/02 (2006.01); H10K 71/00 (2023.01); H10K 50/11 (2023.01); H10K 59/00 (2023.01); H10K 71/16 (2023.01)
CPC G03F 7/0035 (2013.01) [B21B 1/22 (2013.01); C21D 6/001 (2013.01); C21D 8/0247 (2013.01); C22C 38/08 (2013.01); C23C 14/042 (2013.01); C23C 14/24 (2013.01); C25D 1/04 (2013.01); C25D 3/562 (2013.01); G03F 7/0015 (2013.01); G03F 7/0027 (2013.01); G03F 7/2008 (2013.01); G03F 7/2022 (2013.01); H10K 71/00 (2023.02); H10K 50/11 (2023.02); H10K 59/00 (2023.02); H10K 71/166 (2023.02)] 20 Claims
OG exemplary drawing
 
16. A method for manufacturing a metal plate used for manufacturing a deposition mask, the method comprising:
a production step of obtaining the metal plate by a rolling process or a plating process,
wherein the metal plate comprises a surface including a longitudinal direction of the metal plate and a width direction orthogonal to the longitudinal direction, and
wherein a surface reflectance of a reflected light observed when a light is incident on the surface of the metal plate is 8% or more and 25% or less, the surface reflectance being measured based on the reflected light on the surface at an angle of 45°±0.2° in at least one plane orthogonal to the surface.