US 11,733,267 B2
Probe head and probe card
Che-Wei Lin, Hsinchu County (TW); Ting-Ju Wu, Hsinchu County (TW); Keng-Min Su, Hsinchu County (TW); and Chin-Yi Lin, Hsinchu County (TW)
Assigned to MPI CORPORATION, Hsinchu County (TW)
Filed by MPI Corporation, Hsinchu County (TW)
Filed on Mar. 18, 2020, as Appl. No. 16/822,896.
Claims priority of application No. 108110785 (TW), filed on Mar. 27, 2019.
Prior Publication US 2020/0309819 A1, Oct. 1, 2020
Int. Cl. G01R 1/073 (2006.01); G01R 1/067 (2006.01)
CPC G01R 1/07314 (2013.01) [G01R 1/06733 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A probe head suitable for assembling the space transformer having plurality of electrical contact points, the probe head comprising:
an upper guide plate comprising a recessed portion, the recessed portion comprising a plurality of grooves and a plurality of bulged portions, wherein the upper guide plate is provided with an upper surface and a lower surface that are opposite to each other and a plurality of probe holes, the groove is depressed from the upper surface, the groove is provided with a groove bottom surface, the plurality of probe holes are vertically penetrated the groove bottom surface and the lower surface along a first direction, and in the first direction, the groove bottom surface is located between the upper surface and the lower surface, each of the bulged portions is disposed in the recessed portion and protrudes from the groove bottom surface, the plurality of grooves are formed between the bulged portions, each of the bulged portions is provided with a top surface, wherein the top surface is a part of the upper surface, the top surface of the bulged portion is provided for abutting against the space transformer;
a lower guide plate, disposed on the upper guide plate and located on the side of the lower surface; and
a plurality of probes, each provided with a probe tail, a probe body and a probe tip that are connected in sequence, wherein the plurality of probes is disposed in the recessed portion, each of the grooves includes at least one probe, the probe tail forms a stopper, the plurality of probes is arranged in the form of an array or peripherally, the plurality of probes is disposed in the probe holes and surrounds the bulged portion, and in the first direction, an end portion of the probe tail is located between the groove bottom surface and the upper surface, in a second direction perpendicular to the first direction, a width of the bulged portion (W1) is bigger than a width of the stopper (W2), the probe tail is provided for facing to the plurality of electrical contact points of the space transformer.