US 11,733,224 B2
Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use
Johannes Chiu, Bedford, MA (US); Xing Chen, Lexington, MA (US); Chiu-Ying Tai, Chelmsford, MA (US); Michael Harris, Hudson, MA (US); and Atul Aupta, Lexington, MA (US)
Assigned to MKS Instruments, Inc., Andover, MA (US)
Filed by MKS Instruments, Inc., Andover, MA (US)
Filed on Jan. 25, 2022, as Appl. No. 17/583,712.
Application 17/583,712 is a continuation of application No. 16/205,064, filed on Nov. 29, 2018, granted, now 11,262,340.
Claims priority of provisional application 62/646,867, filed on Mar. 22, 2018.
Claims priority of provisional application 62/593,721, filed on Dec. 1, 2017.
Prior Publication US 2022/0214321 A1, Jul. 7, 2022
Int. Cl. G01N 33/00 (2006.01); G01K 17/06 (2006.01); G01N 27/12 (2006.01); G01N 21/3504 (2014.01)
CPC G01N 33/0031 (2013.01) [G01K 17/06 (2013.01); G01N 21/3504 (2013.01); G01N 27/122 (2013.01); G01N 33/0016 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method of measuring the concentration of radicals in a gas stream, comprising:
flowing a radical gas stream emitted from at least one radical gas generator to at least one processing chamber;
providing at least one sampling reaction module having at least one sampling tube therein;
establishing a reference temperature of the at least one sampling tube with at least one thermal control module;
diverting a portion of the radical gas steam from the at least one radical gas generator into the at least one sampling tube;
reacting at least one reagent with at least one radical gas within a defined volume of the at least one radical gas stream thereby forming at least one chemical species within at least one compound stream, the at least one compound stream flowing within the at least one sampling tube;
measuring a change of temperature of the at least one sampling tube due to interaction of the at least one chemical species within the at least one compound stream and the sampling tube with at least one sensor module; and
calculating a concentration of the at least one chemical species within the at least one compound stream flowing within the at least on sampling tube based on the measured temperature change of the at least one sampling tube.