US 11,733,185 B2
Fluorescent X-ray analysis apparatus comprising a plurality of X-ray detectors and an X-ray irradiation unit including a multi-wavelength mirror
Kiyoshi Ogata, Tokyo (JP); Sei Yoshihara, Saitama (JP); Shuichi Kato, Tokyo (JP); Kazuhiko Omote, Tokyo (JP); Hiroshi Motono, Tokyo (JP); and Naoki Matsushima, Tokyo (JP)
Assigned to RIGAKU CORPORATION, Tokyo (JP)
Filed by RIGAKU CORPORATION, Akishima (JP)
Filed on Dec. 29, 2020, as Appl. No. 17/136,604.
Application 17/136,604 is a continuation of application No. PCT/JP2019/018757, filed on May 10, 2019.
Claims priority of application No. 2018-127494 (JP), filed on Jul. 4, 2018.
Prior Publication US 2021/0116399 A1, Apr. 22, 2021
Int. Cl. G01N 23/223 (2006.01); G01N 23/207 (2018.01)
CPC G01N 23/223 (2013.01) [G01N 23/2076 (2013.01); G01N 2223/076 (2013.01); G01N 2223/0766 (2013.01); G01N 2223/406 (2013.01); G01N 2223/61 (2013.01); G01N 2223/611 (2013.01); G01N 2223/6113 (2013.01); G01N 2223/6116 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A fluorescent X-ray analysis apparatus comprising:
an X-ray irradiation unit for irradiating a sample containing a plurality of elements with X-rays;
an X-ray detection unit for detecting fluorescent X-rays emitted from the sample; and
a controller,
wherein the X-ray irradiation unit comprises an X-ray source for emitting continuous X-rays, and a multi-wavelength mirror to which the continuous X-rays emitted from the X-ray source are incident,
wherein the X-ray irradiation unit is configured to focus on a specific measurement target element selected as a measurement target from the plurality of elements contained in the sample and an adjacent element, from the plurality of elements contained in the sample, having an energy absorption edge value larger than an energy absorption edge value of the specific measurement target element, and irradiate the sample with X-rays having energy values, which are larger than the energy absorption edge value of the specific measurement target element and are equal to or less than the energy absorption edge value of the adjacent element,
wherein with respect to a measurement target element for which there is no adjacent element having a larger energy absorption edge value among a plurality of other measurement target elements selected as measurement targets from the plurality of elements contained in the sample, the X-ray irradiation unit is configured so that the sample is also irradiated with X-rays having an energy value larger than an energy absorption edge value of the measurement target element,
wherein the X-ray detection unit comprises a plurality of X-ray detectors, and the plurality of X-ray detectors are arranged around an X-ray irradiation site of the sample to be irradiated with X-rays from the X-ray irradiation unit in such a posture as to take the fluorescent X-rays emitted from the sample, the plurality of X-ray detectors are freely movable independently of one another, and
wherein the controller is configured to move X-ray detectors among the plurality of X-ray detectors having detected X-rays diffracted from the sample to positions where the diffracted X-rays are not incident thereto.