US 11,733,173 B1
Time domain multiplexed defect scanner
Steven W. Meeks, Palo Alto, CA (US); Hung Phi Nguyen, Santa Clara, CA (US); and Alireza Shahdoost Moghaddam, San Jose, CA (US)
Assigned to Lumina Instruments Inc., San Jose, CA (US)
Filed by Lumina Instruments, Inc., San Jose, CA (US)
Filed on Jan. 2, 2023, as Appl. No. 18/92,382.
Application 18/092,382 is a continuation in part of application No. 17/685,719, filed on Mar. 3, 2022.
Application 17/685,719 is a continuation in part of application No. 17/576,986, filed on Jan. 16, 2022.
Application 17/576,986 is a continuation in part of application No. 16/838,026, filed on Apr. 2, 2020, granted, now 11,255,796, issued on Feb. 22, 2022.
Application 16/838,026 is a continuation in part of application No. 16/289,632, filed on Feb. 28, 2019, granted, now 10,641,713, issued on May 5, 2020.
Int. Cl. G01N 21/88 (2006.01)
CPC G01N 21/8806 (2013.01) [G01N 2021/8809 (2013.01); G01N 2021/8845 (2013.01); G01N 2021/8848 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An optical scanning system, comprising:
a first radiating source capable of outputting a first source light beam;
a second radiating source capable of outputting a second source light beam, wherein the optical scanning system causes one of the first source light beam or the second source light beam to be directed towards a sample at an incident angle;
a first time-varying beam reflector configured to direct the first source light beam and the second source light beam toward the sample;
a scan lens configured to focus the first source light beam and the second source light beam reflected by the first time-varying beam reflector onto the sample;
a compound ellipsoidal collector configured to direct light scattered from the sample toward a scattered radiation detector;
a de-scan lens that is configured to output a de-scanned light beam, wherein the de-scanned light beam is created by focusing light reflected from the sample, and wherein the de-scan lens is located approximately one focal length of the de-scan lens from an irradiation location where the first source light beam or second source light beam irradiates the sample;
a focusing lens that is configured to output a focused light beam, wherein the focused light beam is created by focusing the de-scanned light beam output by the de-scan lens;
a polarizing beam splitter that is configured to be irradiated by at least a portion of the focused light beam; and
a first detector that is configured to be irradiated by at least a portion of the collimated light beam that is not reflected by the polarizing beam splitter.