CPC G01L 5/165 (2013.01) [B60C 23/064 (2013.01); G01L 1/146 (2013.01)] | 9 Claims |
1. An electrostatic capacitance detection device formed with a first electrode, an insulating layer on the first electrode, and a second electrode on the insulating layer, the electrostatic capacitance detection device configured to calculate a shear force applied from above an upper portion of the second electrode, wherein
the first electrode is formed of an island-shaped pattern, the island shaped patterns comprise rectangular shapes, rectangular shapes with rounded corners, parallelograms, parallelograms with rounded corners, or ovals,
the second electrode is formed of two layers of an upper second electrode and a lower second electrode, an insulating film is interposed between the upper second electrode and the lower second electrode, and the upper second electrode and the lower second electrode are formed of a plurality of linear patterns intersecting in a plan view,
a portion of the island-shaped pattern of the first electrode overlaps with a portion of the pattern of the upper second electrode and a portion of the pattern of the lower second electrode in a plan view, and
the lower second electrode is located between the upper second electrode and the first electrode, a region where a portion of the island-shaped pattern of the first electrode overlaps with a portion of the pattern of the upper second electrode in a planer view is larger than a region where a portion of the island-shaped pattern of the first electrode overlaps with a portion of the pattern of the lower second electrode in a planer view.
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