US 11,733,113 B2
Strain element, strain element manufacturing method, and physical quantity measuring sensor
Masahiko Nagasaka, Aichi (JP); and Hiroyasu Makino, Aichi (JP)
Assigned to SINTOKOGIO, LTD., Aichi (JP)
Appl. No. 17/52,922
Filed by SINTOKOGIO, LTD., Nagoya (JP)
PCT Filed Jun. 3, 2019, PCT No. PCT/JP2019/021940
§ 371(c)(1), (2) Date Nov. 4, 2020,
PCT Pub. No. WO2019/239938, PCT Pub. Date Dec. 19, 2019.
Claims priority of application No. 2018-113889 (JP), filed on Jun. 14, 2018.
Prior Publication US 2021/0231514 A1, Jul. 29, 2021
Int. Cl. G01L 5/00 (2006.01); G01L 5/1627 (2020.01); G01L 1/22 (2006.01); B24C 1/10 (2006.01)
CPC G01L 5/1627 (2020.01) [G01L 1/2287 (2013.01); B24C 1/10 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A strain element which is elastically deformable in response to a load and which is configured to have a strain gauge disposed thereon, the strain gauge being configured to carry out detection of strain associated with deformation,
the strain element comprising a strain portion which corresponds to a region subject to strain and includes an area for disposition of the strain gauge,
the strain portion including an arm portion, and
the strain portion being provided with a residual stress layer having negative residual stress and extending on all four sides of the arm portion.