CPC G01F 15/002 (2013.01) [G01F 25/17 (2022.01)] | 20 Claims |
1. A method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system, the method comprising:
prioritizing the plurality of MFCs for the calibration operation, the prioritizing comprising:
determining an operation time for each MFC of the plurality of MFCs, and
ranking the plurality of MFCs in a rank list according to the operation time for each MFC;
conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system, the calibration operation comprising:
setting a first MFC to a flow mode to flow a gas through the first MFC at a target flow rate,
directing the gas to a mass flow verifier,
stepping the target flow rate of the gas through a plurality of flow rates corresponding to a plurality of setpoints, and
verifying a measured flow rate of the gas at each of the plurality of setpoints using the mass flow verifier.
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