US 11,733,021 B2
Modular configuration for coordinate measuring machine probe
Dawn Alisa Keehnel, Bothell, WA (US); Christopher Richard Hamner, Kirkland, WA (US); Scott Ellis Hemmings, Edmonds, WA (US); and Scott Allen Harsila, Shoreline, WA (US)
Assigned to Mitutoyo Corporation, Kanagawa-ken (JP)
Filed by Mitutoyo Corporation, Kanagawa-ken (JP)
Filed on Dec. 22, 2021, as Appl. No. 17/559,554.
Prior Publication US 2023/0194235 A1, Jun. 22, 2023
Int. Cl. G01B 7/016 (2006.01); G01B 11/00 (2006.01); G01B 5/016 (2006.01)
CPC G01B 7/016 (2013.01) [G01B 5/016 (2013.01); G01B 11/007 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A modular configuration for a scanning probe for a coordinate measuring machine, the modular configuration for the scanning probe comprising:
a stylus suspension module, comprising:
a stylus coupling portion that is configured to be rigidly coupled to a stylus with a probe tip; and
a stylus motion mechanism that enables axial motion of the stylus coupling portion along an axial direction, and rotary motion of the stylus coupling portion about a rotation center;
a stylus position detection module configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module as part of assembling the scanning probe, wherein when mounted the stylus position detection module is configured to be arranged along a central axis that is parallel to the axial direction and nominally aligned with the rotation center, the stylus position detection module comprising:
a sensor configuration comprising:
a field generating coil configuration comprising at least one field generating coil;
a top axial sensing coil configuration comprising at least one top axial sensing coil;
a bottom axial sensing coil configuration comprising at least one bottom axial sensing coil; and
a plurality of top rotary sensing coils and a plurality of bottom rotary sensing coils;
wherein a disruptor configuration of the scanning probe is configured to be coupled to the stylus suspension module, the disruptor configuration comprising a conductive disruptor element that provides a disruptor area, wherein the disruptor element is configured to be located along the central axis in a disruptor motion volume and to be coupled to the stylus suspension module by a disruptor coupling configuration, and to move in the disruptor motion volume relative to an undeflected position in response to a deflection of the stylus suspension module, for which the disruptor element moves over operating motion ranges+/−Rz along the axial direction in response to the axial motion, and over respective operating motion ranges+/−Rx and +/−Ry along orthogonal X and Y directions that are orthogonal to the axial direction in response to the rotary motion, and the field generating coil configuration is configured to generate a changing magnetic flux generally along the axial direction in the disruptor motion volume in response to a coil drive signal; and
a signal processing and control circuitry module that is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe, wherein the signal processing and control circuitry module is configured to be operably connected to the coils of the stylus position detection module to provide the coil drive signal and to input signals comprising respective signal components provided by the respective rotary and axial sensing coils, and to output signals indicative of an axial position and a rotary position of one or more of the disruptor element, the stylus coupling portion, or the probe tip.