US 11,732,361 B2
Metal plate for manufacturing deposition mask, method for manufacturing metal plate, deposition mask and method for manufacturing deposition mask
Hiroki Oka, Tokyo (JP); Chikao Ikenaga, Tokyo (JP); Sachiyo Matsuura, Tokyo (JP); Shogo Endo, Tokyo (JP); Chiaki Hatsuta, Tokyo (JP); and Asako Narita, Tokyo (JP)
Assigned to Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed by Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed on Oct. 14, 2020, as Appl. No. 17/70,127.
Application 17/070,127 is a continuation in part of application No. 16/940,791, filed on Jul. 28, 2020.
Claims priority of application No. 2019-185424 (JP), filed on Oct. 8, 2019; application No. 2020-126760 (JP), filed on Jul. 27, 2020; and application No. 2020-164041 (JP), filed on Sep. 29, 2020.
Prior Publication US 2021/0108312 A1, Apr. 15, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/458 (2006.01); C21D 8/02 (2006.01); C21D 6/00 (2006.01); C23F 1/28 (2006.01); C22C 33/04 (2006.01); C23F 1/02 (2006.01); C22C 38/08 (2006.01); H10K 71/00 (2023.01)
CPC C23C 16/4582 (2013.01) [C21D 6/001 (2013.01); C21D 8/021 (2013.01); C21D 8/0226 (2013.01); C21D 8/0247 (2013.01); C21D 8/0263 (2013.01); C21D 8/0278 (2013.01); C22C 33/04 (2013.01); C22C 38/08 (2013.01); C23F 1/02 (2013.01); C23F 1/28 (2013.01); H10K 71/00 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A metal plate used for manufacturing a deposition mask, the metal plate comprising:
a first surface and a second surface positioned on the opposite side of the first surface, the metal plate being made of an invar material containing iron and nickel in an amount of 34% by mass or more; and
particles containing as a main component an element other than iron and nickel,
wherein in a sample including the first surface and the second surface of the metal plate, the following conditions (1) and (2) regarding the particles are satisfied
(1) a number of the particles having an equivalent circle diameter of 1 μm or more is 50 or more and 3000 or less per 1 mm3 in the sample, and
(2) a number of the particles having an equivalent circle diameter of 3 μm or more is 50 or less per 1 mm3 in the sample.