CPC C23C 16/45565 (2013.01) [C23C 16/455 (2013.01); C23C 16/45536 (2013.01); C23C 16/50 (2013.01); C23C 16/52 (2013.01)] | 15 Claims |
1. A processing method comprising: flowing a first gas through a first inlet line into a gas funnel; flowing a second gas through a second inlet line connected to the first inlet line upstream of the gas funnel, the second gas flowing through a valve configured to allow a flow of gas downstream only; igniting a plasma of the second gas; exhausting gases through a pump liner; wherein the pump liner comprises a body having an inner wall, an outer wall, a top wall and a bottom wall, the body having a lower portion and an upper portion, the inner wall extending around a central axis spaced a first distance from the central axis forming an open central region; and powering a liner heater to control a temperature in the pump liner, wherein the liner heater comprises a plurality of separate segments spaced around the top wall of the pump liner wherein each of the segments is independently controlled.
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