CPC C09K 13/04 (2013.01) [H01L 21/02071 (2013.01); H01L 21/32134 (2013.01)] | 46 Claims |
1. A chemical solution comprising:
one or more kinds of periodic acids selected from the group consisting of a periodic acid and a salt thereof;
a first metal component which is Zr; and
water,
wherein a content of the first metal component is 1 ppt by mass to 100 ppm by mass with respect to a total mass of the periodic acids in the chemical solution.
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