US 12,396,315 B2
Flexible transparent electrode structure having superior light transmittance, water permeation resistance and oxygen permeation resistance, method for preparing the same, and organic optoelectronic device using the same
Won-Kook Choi, Seoul (KR); and Keun Yong Lim, Seoul (KR)
Assigned to Korea Institute of Science and Technology, Seoul (KR)
Filed by KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY, Seoul (KR)
Filed on Sep. 23, 2022, as Appl. No. 17/951,178.
Claims priority of application No. 10-2021-0129105 (KR), filed on Sep. 29, 2021.
Prior Publication US 2023/0099482 A1, Mar. 30, 2023
Int. Cl. H10K 30/82 (2023.01); H10K 50/816 (2023.01)
CPC H10K 30/82 (2023.02) [H10K 50/816 (2023.02)] 14 Claims
OG exemplary drawing
 
1. A flexible transparent electrode structure comprising:
a flexible substrate;
a thin film laminate of a triple-layer structure formed on both sides of the flexible substrate; and
a transparent electrode formed on the thin film laminate of a triple-layer structure provided on one side of the flexible substrate,
wherein the thin film laminate of a triple-layer structure comprises a SiNx thin film, a SiOxNy thin film and a SiOx thin film formed sequentially on the flexible substrate.