| CPC H10B 12/50 (2023.02) [H10B 12/0335 (2023.02); H10B 12/053 (2023.02); H10B 12/09 (2023.02); H10B 12/315 (2023.02); H10B 12/34 (2023.02); H10B 12/482 (2023.02); H10B 12/485 (2023.02)] | 15 Claims |

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1. A semiconductor device, comprising:
a substrate comprising a first island, a second island and an isolation structure disposed between the first island and the second island, wherein the first island has a first area, and the second island has a second area greater than the first area;
an access transistor disposed in or on the first island;
a storage capacitor disposed over the access transistor;
a storage node contact connecting the storage capacitor to the access transistor;
a conductive line disposed over the substrate; and
a conductive feature connecting the conductive line to the second island,
wherein a top surface of the conductive feature and a top surface of the storage node contact are disposed at a same horizontal level.
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