US 12,396,084 B2
Dielectric barrier discharge plasma generator
Jun Qi, Hong Kong (CN); Hao Meng, Chengdu (CN); Zheng Chen, Chengdu (CN); Yi Dong Du, Chengdu (CN); and Li Dong He, Chengdu (CN)
Assigned to ASMPT SINGAPORE PTE. LTD., Singapore (SG)
Filed by ASMPT Singapore Pte. Ltd., Singapore (SG)
Filed on Jun. 1, 2023, as Appl. No. 18/204,586.
Claims priority of application No. 202210642604.0 (CN), filed on Jun. 8, 2022.
Prior Publication US 2023/0403781 A1, Dec. 14, 2023
Int. Cl. H05H 1/24 (2006.01)
CPC H05H 1/2406 (2013.01) [H05H 2242/10 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A dielectric barrier discharge plasma generator, the plasma generator comprising:
a ground electrode that forms a casing, and a high voltage electrode enclosed within the casing, the ground electrode and the high voltage electrode being configured to form a circuit to receive a power input for plasma generation,
a dielectric barrier having a first surface in contact with the high voltage electrode, and a second surface facing the ground electrode, a discharge gap being formed between the second surface of the dielectric barrier and the ground electrode for generating plasma,
a resiliently deformable mechanism operative to bias the high voltage electrode against the first surface of the dielectric barrier, and
a plasma outlet on the casing formed by the ground electrode, the plasma outlet being operative to discharge plasma onto an electronic component located outside the casing.