US 12,395,150 B2
Vibration device having a through electrode and a clock signal output external connection terminal
Noboru Itomi, Nirasaki (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Nov. 24, 2021, as Appl. No. 17/456,391.
Claims priority of application No. 2020-195823 (JP), filed on Nov. 26, 2020.
Prior Publication US 2022/0166405 A1, May 26, 2022
Int. Cl. H03H 9/19 (2006.01); H03H 9/02 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01); H03H 9/13 (2006.01)
CPC H03H 9/19 (2013.01) [H03H 9/02102 (2013.01); H03H 9/02133 (2013.01); H03H 9/0557 (2013.01); H03H 9/1021 (2013.01); H03H 9/13 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A vibration device comprising:
a base including a semiconductor substrate having a first surface that is a front surface and a second surface that is a rear surface and a through electrode that passes through a portion between the first and second surfaces;
a vibrator placed at a side facing the first surface;
a first external connection terminal provided at a side facing the second surface via an insulating layer; and
a second external connection terminal for a constant potential signal provided at the side facing the second surface via the insulating layer,
wherein components below are placed at the second surface,
an oscillation circuit that is electrically coupled to the vibrator via the through electrode and generates an oscillation signal by causing the vibrator to oscillate, and
an output buffer circuit that outputs a clock signal based on the oscillation signal,
the clock signal from the output buffer circuit is outputted via the first external connection terminal,
the through electrode and the first external connection terminal are arranged so as not to overlap with each other in a plan view viewed in a direction perpendicular to the first surface, and
the through electrode is placed so as to overlap with the second external connection terminal in the plan view.