| CPC H01L 24/75 (2013.01) [G06T 7/60 (2013.01); H01L 24/81 (2013.01); H01L 2224/75001 (2013.01); H01L 2224/81201 (2013.01)] | 20 Claims |

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1. A method to aid in a calibration of a compression system comprising:
mounting a first substrate with a first surface facing outward in a press, wherein the press has a plurality of calibration parameters, and the first substrate has a test film on the first surface;
mounting a second substrate in the press with a second surface of the second substrate facing the first surface of the first substrate, wherein the second substrate has a plurality of spikes arranged in a spike pattern on the second surface;
compressing the first substrate and the second substrate together with a force that causes the plurality of spikes to form a plurality of indentations in the test film;
separating the first substrate from the second substrate;
determining, with a sensor, a plurality of local pressures applied by the plurality of spikes against the test film during the compressing and generating an image of the plurality of indentations in the test film, wherein a plurality of light intensities in the image are representative of the plurality of local pressures applied by the plurality of spikes against the test film during the compressing; and
adjusting one or more of the plurality of calibration parameters of the press in response to the plurality of local pressures.
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