| CPC H01L 23/38 (2013.01) | 14 Claims |

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1. A thermal thick film integrated circuit comprising: a metal substrate and a vapor chamber which are arranged in layers, and one or more thermoelectric element sandwiched between the metal substrate and the vapor chamber, wherein a first surface of the one or more thermoelectric elements is in contact with the metal substrate and wherein a second surface of the one or more thermoelectric elements is in contact with the vapor chamber, wherein an integrated circuit is arranged on a surface of the metal substrate proximal to the vapor chamber, such that the integrated circuit is in between the metal substrate and the vapor chamber, and the one or more thermoelectric element being connected to a power supply.
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