US 12,394,638 B2
Fluid routing for a vacuum pumping system
Declan Scanlan, Dublin (IE)
Assigned to Edwards Limited, Burgess Hill (GB)
Appl. No. 18/558,659
Filed by Edwards Limited, Burgess Hill (GB)
PCT Filed May 6, 2022, PCT No. PCT/GB2022/051152
§ 371(c)(1), (2) Date Nov. 2, 2023,
PCT Pub. No. WO2022/234288, PCT Pub. Date Nov. 10, 2022.
Claims priority of application No. 2106501 (GB), filed on May 7, 2021.
Prior Publication US 2024/0213042 A1, Jun. 27, 2024
Int. Cl. H01L 21/67 (2006.01)
CPC H01L 21/67017 (2013.01) 14 Claims
OG exemplary drawing
 
1. A fluid routing module for a vacuum pumping system, the fluid routing module comprising:
a first fluid inlet;
a second fluid inlet;
a fluid outlet;
a first fluid line coupled between the first fluid inlet and the fluid outlet;
a second fluid line coupled between the second fluid inlet and the fluid outlet;
a first restrictor configured to restrict a flow of the fluid therethrough, the first restrictor being disposed along the first fluid line;
a vacuum pump disposed along the second fluid line; and
one or more valves configured to selectably direct a fluid flow through either the first fluid line or the second fluid line;
a second restrictor configured to restrict a flow of the fluid therethrough, the second restrictor being disposed along the second fluid line;
a bypass line arranged in parallel with the second restrictor whereby to allow a flow of fluid to bypass the second restrictor; and
one or more further valves configured to selectably direct a fluid flow through either the second restrictor or the bypass line.