US 12,394,635 B2
Systems and methods for processing a substrate
Sheng-chun Yang, Hsinchu (TW); Po-Chih Huang, Hsinchu (TW); Chih-Lung Cheng, Hsinchu (TW); Yi-Ming Lin, Hsinchu (TW); Chen-Hao Liao, Hsinchu (TW); and Min-Cheng Chung, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Aug. 27, 2021, as Appl. No. 17/459,821.
Prior Publication US 2023/0067115 A1, Mar. 2, 2023
Int. Cl. H01L 21/324 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/324 (2013.01) [H01L 21/67017 (2013.01); H01L 21/67115 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system, comprising:
a substrate staging module including a wall, the wall having an access port;
a gas flow stabilizer proximate to a first side of the access port, the gas flow stabilizer including a horizontal flow section and a vertical flow section, the horizontal flow section of the gas flow stabilizer overlying the vertical flow section of the gas flow stabilizer, the horizontal flow section of the gas flow stabilizer including a plurality of overlapping horizontal gas flow paths and the vertical flow section of the gas flow stabilizer including a plurality of vertical gas flow paths; and
a gas flow receiver proximate to a second side of the access port, the gas flow receiver including a vertical flow section and a horizontal flow section, the vertical flow section of the gas flow receiver overlying the horizontal flow section of the gas flow receiver, the vertical flow section of the gas flow receiver including a plurality of vertical gas flow paths, and the horizontal flow section of the gas flow receiver including a plurality of overlapping horizontal gas flow paths,
wherein each of the plurality of overlapping horizontal gas flow paths in the gas flow stabilizer is opposite in horizontal direction to a preceding horizontal gas flow path.
 
14. A system, comprising:
a substrate staging module including a wall with an access port;
a gas flow stabilizer included above the access port and coupled to a surface of the wall interior to the substrate staging module, the gas flow stabilizer including a horizontal flow section and a vertical flow section, the horizontal flow section of the gas flow stabilizer overlying the vertical flow section of the gas flow stabilizer, the horizontal flow section of the gas flow stabilizer including a plurality of horizontal gas flow paths and the vertical flow section of the gas flow stabilizer including a plurality of vertical gas flow paths, wherein the plurality of horizontal gas flow paths is serpentine; and
a gas flow receiver included below the access port and coupled to the surface of the wall interior to the substrate staging module, the gas flow receiver including a vertical flow section and a horizontal flow section, the vertical flow section of the gas flow receiver overlying the horizontal flow section of the gas flow receiver, the vertical flow section of the gas flow receiver including a plurality of vertical gas flow paths, and the horizontal flow section of the gas flow receiver including a plurality of horizontal gas flow paths.
 
18. A system, comprising:
a substrate staging module including a wall, the wall having an access port;
a gas flow stabilizer proximate to a first side of the access port and coupled to the wall, the gas flow stabilizer including a horizontal flow section and a vertical flow section, the horizontal flow section of the gas flow stabilizer overlying the vertical flow section of the gas flow stabilizer, the horizontal flow section of the gas flow stabilizer including a plurality of overlapping horizontal gas flow paths and the vertical flow section of the gas flow stabilizer including a plurality of vertical gas flow paths, wherein the plurality of overlapping horizontal gas flow paths of the gas flow stabilizer are defined between a plurality of overlapping horizontal plates, and the plurality of vertical gas flow paths of the gas flow stabilizer are defined between a plurality of vertical plates; and
a gas flow receiver proximate to a second side of the access port and coupled to the wall, the gas flow receiver including a vertical flow section and a horizontal flow section, the vertical flow section of the gas flow receiver overlying the horizontal flow section of the gas flow receiver, the vertical flow section of the gas flow receiver including a plurality of vertical gas flow paths, and the horizontal flow section of the gas flow receiver including a plurality of overlapping horizontal gas flow paths.