US 12,394,614 B2
Ion source
Bruce D. Quimby, Santa Clara, CA (US); and Anastasia A. Andrianova, Santa Clara, CA (US)
Assigned to AGILENT TECHNOLOGIES, INC., Santa Clara, CA (US)
Filed by AGILENT TECHNOLOGIES, INC., Santa Clara, CA (US)
Filed on Jun. 18, 2024, as Appl. No. 18/747,343.
Application 18/747,343 is a continuation of application No. 16/830,577, filed on Mar. 26, 2020, granted, now 12,033,843.
Application 18/747,343 is a continuation of application No. PCT/US2021/014634, filed on Jan. 22, 2021.
Prior Publication US 2024/0339313 A1, Oct. 10, 2024
Int. Cl. H01J 49/06 (2006.01); G01N 30/72 (2006.01); H01J 49/14 (2006.01)
CPC H01J 49/067 (2013.01) [G01N 30/7206 (2013.01); H01J 49/145 (2013.01); H01J 49/147 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A method of analyzing a sample with a mass spectrometer, the method comprising:
flowing the sample in a carrier gas comprising hydrogen through a sample entrance of the mass spectrometer;
ionizing the sample using an ion source of the mass spectrometer, the ion source comprising:
a plurality of components defining a flow path therethrough, an inner surface of at least one of the plurality of components having a coating of a layer of silicon, silicon hydride, or a combination thereof, the coating having a thickness between about 400 Angstroms to 1000 Angstroms; and
analyzing the ions based on ion mass.