US 12,394,604 B2
Plasma source with floating electrodes
Quoc Truong, San Ramon, CA (US); Dmitry A. Dzilno, Sunnyvale, CA (US); and Robert B. Moore, Bigfork, MT (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 11, 2020, as Appl. No. 17/017,952.
Prior Publication US 2022/0084796 A1, Mar. 17, 2022
Int. Cl. H01L 21/00 (2006.01); C23C 16/00 (2006.01); C23C 16/455 (2006.01); H01J 37/32 (2006.01); H01L 21/02 (2006.01); H05H 1/36 (2006.01); H05H 1/34 (2006.01)
CPC H01J 37/32541 (2013.01) [C23C 16/45536 (2013.01); H01J 37/32091 (2013.01); H01J 37/32532 (2013.01); H01J 37/3255 (2013.01); H01L 21/0228 (2013.01); H05H 1/36 (2013.01); H05H 1/3431 (2021.05)] 18 Claims
OG exemplary drawing
 
1. A plasma source assembly comprising:
a first electrode comprising a conductive plate having a top surface, a bottom surface, and an outer peripheral edge;
a second electrode comprising a conductive plate having a top surface, a bottom surface, and an outer peripheral edge;
a dielectric spacer separating the first electrode and the second electrode and disposed at the outer peripheral edge of the first electrode and the outer peripheral edge of the second electrode;
a power feed electrically connected to the first electrode and the second electrode; and
a first helical spring having a shape of a ring disposed between the bottom surface of the first electrode and the dielectric spacer and adjacent to the outer peripheral edge of the first electrode; and
a second helical spring in the shape of a ring disposed between the top surface of the second electrode and the dielectric spacer and adjacent to the outer peripheral edge of the second electrode, wherein each of the first helical spring and the second helical spring comprises a conductive material.