US 12,394,597 B2
Adaptive engine with estimation law modules for plasma processing power system
Chad S. Samuels, Fort Collins, CO (US)
Assigned to Advanced Energy Industries, Inc., Denver, CO (US)
Filed by Advanced Energy Industries, Inc., Denver, CO (US)
Filed on Jun. 30, 2022, as Appl. No. 17/855,683.
Prior Publication US 2024/0006151 A1, Jan. 4, 2024
Int. Cl. G05B 13/04 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/32137 (2013.01) [G05B 13/042 (2013.01); H01J 37/32183 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An adaptive engine configured to receive a series of reference signals and in response provide a control to one or more actuators controlling parameters of a plasma processing power system and/or a match network, the adaptive engine comprising: a processor; a memory storing instructions that, when executed by the processor, cause the adaptive engine to implement:
a nonlinear model of the one or more actuators, the plasma processing power system, and/or the match network controlled by the one or more actuators;
a plurality of estimation law modules each configured to estimate an estimated model parameter tensor, θ, for the nonlinear model, by seeking to minimize an estimation error, ê, or cost function, J, each calculated from a measured system output and one or more of (1) an estimated system output, and (2) a reference signal;
a plurality of control law sub-engines each configured to apply one of a plurality of control laws to the estimated parameter tensors, θ, to generate a possible control signal, use, for each of the estimated parameter tensors, θ, wherein the adaptive engine performs multiple iterations, each iteration comprising estimating the estimated model parameter tensor and generating the possible control signal;
the plurality of estimation law modules or the plurality of control law sub-engines configured to apply the nonlinear model to the possible control signal, use, from a current iteration or a previous iteration, and corresponding ones of the estimated parameter tensors, θ, to estimate estimated system outputs, yest_se; and
a selector module configured to:
calculate an estimated system error, êout, for each of the possible control signals, use, based on corresponding ones of the estimated system outputs, yest_se, and select a one or combination of the possible control signals, use, associated with a smallest of the estimated system errors, êout, for controlling the one or more actuators;
wherein the one or more actuators are configured to, based on the selected one or a combination of the possible control signals, use, control power and/or frequency of the plasma processing power system.