US 12,394,589 B2
Charged particle device, detector, and methods
Albertus Victor Gerardus Mangnus, Eindhoven (NL); and Erwin Slot, Zoetermeer (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Jul. 1, 2022, as Appl. No. 17/856,722.
Claims priority of application No. 21183811 (EP), filed on Jul. 5, 2021.
Prior Publication US 2023/0005706 A1, Jan. 5, 2023
Int. Cl. H01J 37/244 (2006.01); H01J 37/145 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/244 (2013.01) [H01J 37/145 (2013.01); H01J 37/28 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/2448 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A detector for use in a charged particle device for an assessment tool, the charged particle device configured to project a beam of charged particles to a sample and the detector to detect resulting signal particles from the sample, the detector comprising a substrate, the substrate comprising:
a semiconductor element configured to detect signal particles above a first energy threshold; and
a charge-based element configured to detect signal particles below a second energy threshold,
wherein the charge-based element and the semiconductor element are each at least part of layers that are substantially co-planar with major surfaces of the detector and the layers are comprised in a stacked structure comprised in the detector stacked in a thickness direction of the detector, and
wherein the charge-based element is connected by a first electrical connection to detection circuitry and the semiconductor element is connected by a second electrical connection to detection circuitry, the first electrical connection being separate from the second electrical connection.