US 12,394,577 B2
Two-stage actuation in MEMS ohmic relays
Roberto Gaddi, Rosmalen (NL); and Robertus Petrus Van Kampen, S-Hertogenbosch (NL)
Assigned to Qorvo US, Inc., Greensboro, NC (US)
Filed by Qorvo US, Inc., Greensboro, NC (US)
Filed on Sep. 30, 2022, as Appl. No. 17/957,856.
Claims priority of provisional application 63/275,851, filed on Nov. 4, 2021.
Claims priority of provisional application 63/275,571, filed on Nov. 4, 2021.
Prior Publication US 2023/0140449 A1, May 4, 2023
Int. Cl. H01H 1/00 (2006.01); H01H 59/00 (2006.01)
CPC H01H 1/0036 (2013.01) [H01H 59/0009 (2013.01); H01H 2001/0084 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A microelectromechanical system (MEMS) switch, comprising:
a first conductive contact disposed over a substrate;
a second conductive contact disposed over the substrate, the first conductive contact and the second conductive contact forming a first set of conductive contacts;
a third conductive contact disposed over the substrate;
a fourth conductive contact disposed over the substrate, the third conductive contact and the fourth conductive contact forming a second set of conductive contacts, wherein the first set of conductive contacts are positioned between the third conductive contact and the fourth conductive contact; and
a movable beam suspended over the first set of conductive contacts and the second set of conductive contacts, wherein:
the first set of conductive contacts and the movable beam are operable to create a first conduction path when the movable beam contacts the first set of conductive contacts; and
the second set of conductive contacts and the movable beam are operable to create a second conduction path when the movable beam contacts the second set of conductive contacts.