US 12,394,038 B2
Image processing program, image processing device, and image processing method
Masanori Ouchi, Tokyo (JP); Shinichi Shinoda, Tokyo (JP); Yasutaka Toyoda, Tokyo (JP); Ryou Yumiba, Tokyo (JP); and Hiroyuki Shindo, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/596,025
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Jun. 13, 2019, PCT No. PCT/JP2019/023447
§ 371(c)(1), (2) Date Dec. 2, 2021,
PCT Pub. No. WO2020/250373, PCT Pub. Date Dec. 17, 2020.
Prior Publication US 2022/0318975 A1, Oct. 6, 2022
Int. Cl. G06T 7/00 (2017.01); G06T 9/00 (2006.01)
CPC G06T 7/001 (2013.01) [G06T 9/005 (2013.01); G06T 2207/30148 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A non-transitory computer-readable medium storing an image processing program for performing an inspection on a sample by using reference data of the sample, and input data pertaining to the sample, the image processing program causing a processor to implement:
receiving the reference data;
calculating, by a convolutional neural network, a feature value pertaining to the sample based on the reference data;
calculating a statistic indicating probability distribution of the input data based on the feature value; and
determining whether a defect exists in the sample based on the feature value and the statistic.