US 12,393,209 B2
Methods and apparatus for reporting inlet pressure in mass flow controllers
Junhua Ding, Boxborough, MA (US)
Assigned to MKS, Inc., Andover, MA (US)
Filed by MKS Instruments, Inc., Andover, MA (US)
Filed on Jan. 19, 2024, as Appl. No. 18/417,194.
Prior Publication US 2025/0238043 A1, Jul. 24, 2025
Int. Cl. G05D 7/06 (2006.01); F16K 7/16 (2006.01); F16K 31/00 (2006.01); G01F 1/34 (2006.01); G01F 1/36 (2006.01); G01F 1/42 (2006.01); G01F 1/50 (2006.01); G01F 1/86 (2006.01)
CPC G05D 7/0647 (2013.01) [F16K 7/16 (2013.01); F16K 31/004 (2013.01); G01F 1/34 (2013.01); G01F 1/363 (2013.01); G01F 1/42 (2013.01); G01F 1/50 (2013.01); G01F 1/86 (2013.01); G05D 7/0635 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A mass flow controller comprising:
a chamber configured to receive a fluid;
an upstream valve disposed upstream of the chamber;
a downstream control valve disposed downstream of the chamber;
a pressure sensor that detects fluid pressure in the chamber; and
a controller configured to control the downstream control valve to control flow therethrough and to control actuation of the upstream valve, the controller configured to toggle between:
when the upstream valve is open, reporting a measured inlet pressure based on a reading from the pressure sensor and storing the reading to a buffer; and
when the upstream valve is closed, reporting the measured inlet pressure based on the reading stored to the buffer.