US 12,393,183 B2
Simulation method, simulation apparatus, film forming apparatus, article manufacturing method, and non-transitory computer-readable storage medium
Tetsuji Okada, Saitama (JP); and Yuichiro Oguchi, Tokyo (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jan. 11, 2023, as Appl. No. 18/153,005.
Claims priority of application No. 2022-007272 (JP), filed on Jan. 20, 2022.
Prior Publication US 2023/0229151 A1, Jul. 20, 2023
Int. Cl. G05B 19/418 (2006.01); B29C 43/00 (2006.01)
CPC G05B 19/41885 (2013.01) [B29C 43/00 (2013.01); G05B 2219/32337 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A simulation method of predicting, by an information processing apparatus, a behavior of a composition in processing of bringing the composition arranged on a first member into contact with a second member and forming a film of the composition on the first member, comprising:
predicting the behavior of the composition in the processing;
calculating a distribution of distortion that occurs in at least one of the first member and the second member in the processing; and
displaying the distribution of distortion calculated in the calculating,
wherein in the displaying, in a case where at least one piece of input information is selected from a plurality of pieces of input information used to predict the behavior of the composition, the at least one piece of input information is displayed to be superimposed as a two-dimensional image on the distribution of distortion.