US 12,393,095 B2
Hollow-core photonic crystal fiber based broadband radiation generator
Janneke Ravensbergen, Würzburg (DE); Patrick Sebastian Uebel, Marloffstein (DE); and Willem Richard Pongers, Veldhoven (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Nov. 9, 2023, as Appl. No. 18/505,860.
Application 18/505,860 is a continuation of application No. 17/539,347, filed on Dec. 1, 2021, granted, now 11,846,867.
Claims priority of application No. 20213013 (EP), filed on Dec. 10, 2020; and application No. 21178292 (EP), filed on Jun. 8, 2021.
Prior Publication US 2024/0118584 A1, Apr. 11, 2024
Int. Cl. G02F 1/35 (2006.01); G02B 6/02 (2006.01); G02F 1/365 (2006.01); G03F 9/00 (2006.01); G06F 30/392 (2020.01); G06F 30/398 (2020.01); H01S 3/067 (2006.01); G06F 119/18 (2020.01)
CPC G02F 1/3528 (2021.01) [G02B 6/02328 (2013.01); G02F 1/365 (2013.01); G03F 9/7034 (2013.01); G06F 30/392 (2020.01); G06F 30/398 (2020.01); H01S 3/06741 (2013.01); G06F 2119/18 (2020.01)] 20 Claims
OG exemplary drawing
 
1. A broadband radiation source device comprising a hollow-core photonic crystal fiber (HC-PCF) to generate broadband output radiation upon receipt of pump radiation therein, the HC-PCF comprising at least one structurally varied portion, wherein the at least one structurally varied portion is configured to have radiation pass therethrough and has at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF so as to narrow or widen a hollow core region through which radiation passes.