US 12,393,046 B2
Metrology systems, coherence scrambler illumination sources and methods thereof
Irwan Dani Setija, Utrecht (NL); Arie Jeffrey Den Boef, Waalre (NL); Mohamed Swillam, Wilton, CT (US); and Arjan Johannes Anton Beukman, Son en Breugel (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL); and ASML Holding N.V., Veldhoven (NL)
Appl. No. 17/764,057
Filed by ASML Netherlands B.V., Veldhoven (NL); and ASML Holding N.V., Veldhoven (NL)
PCT Filed Sep. 15, 2020, PCT No. PCT/EP2020/075785
§ 371(c)(1), (2) Date Mar. 25, 2022,
PCT Pub. No. WO2021/058338, PCT Pub. Date Apr. 1, 2021.
Claims priority of provisional application 62/907,049, filed on Sep. 27, 2019.
Prior Publication US 2022/0342228 A1, Oct. 27, 2022
Int. Cl. G02B 27/48 (2006.01); G02F 1/295 (2006.01); G03F 7/00 (2006.01)
CPC G02B 27/48 (2013.01) [G02F 1/2955 (2013.01); G03F 7/70616 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A system comprising:
a radiation source;
a multimode optical element configured to output a beam of radiation;
a phased array configured to generate a directed beam of radiation, the phased array comprising:
optical elements configured to radiate radiation waves;
waveguides configured to guide radiation from the radiation source to the optical elements; and
phase modulators configured to adjust phases of radiation in the waveguides such that the radiation waves accumulate to form the directed beam of radiation that impinges on an input surface of the multimode optical element, wherein an amount of incoherence of the beam of radiation is based on adjustments of a location of impingement of the directed beam on the input surface.