US 12,393,011 B2
Optical imaging system, methods, systems, and computer programs
Kai Ritschel, Wetzlar (DE); and Mate Beljan, Wetzlar (DE)
Assigned to Leica Microsystems CMS GmbH, Wetzlar (DE)
Filed by Leica Microsystems CMS GmbH, Wetzlar (DE)
Filed on Nov. 21, 2023, as Appl. No. 18/515,339.
Claims priority of application No. 102022130872.3 (DE), filed on Nov. 22, 2022.
Prior Publication US 2024/0168274 A1, May 23, 2024
Int. Cl. G02B 21/36 (2006.01); G02B 21/26 (2006.01)
CPC G02B 21/367 (2013.01) [G02B 21/26 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A method for an optical imaging system, the method comprising:
obtaining first image data of an imaging device of the imaging system, the first image data comprising a representation of a pattern;
obtaining second image data of the pattern from the imaging device after the pattern has been displaced by a stage of the optical imaging system by a distance in a dimension defined relative to the stage;
determining an offset between the patterns of the first and second image data in two dimensions;
calculating a conversion parameter based on the offset and the distance; and
controlling a drive unit for displacing the stage based on the conversion parameter.