US 12,392,820 B2
Test system with adjustable delay line and radiation feedback control
Bryan Edward Cole, Cambridge (GB); Darius Sullivan, Cambridge (GB); and Simon Chandler, Cambridge (GB)
Assigned to TeraView Limited, Cambridge (GB)
Filed by TeraView Limited, Cambridge (GB)
Filed on Feb. 23, 2024, as Appl. No. 18/585,589.
Application 18/585,589 is a continuation of application No. 17/745,054, filed on May 16, 2022, granted, now 11,921,154.
Application 17/745,054 is a continuation of application No. 16/061,375, granted, now 11,366,158, issued on Jun. 1, 2022, previously published as PCT/GB2016/053976, filed on Dec. 16, 2016.
Claims priority of application No. 1522432 (GB), filed on Dec. 18, 2015.
Prior Publication US 2024/0192270 A1, Jun. 13, 2024
Int. Cl. G01R 31/28 (2006.01); G01R 31/308 (2006.01); G01R 35/00 (2006.01)
CPC G01R 31/2887 (2013.01) [G01R 31/308 (2013.01); G01R 35/005 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A test system for testing a device, the test system comprising:
a source of pulsed radiation configured to provide a generating radiation beam and a receiving radiation beam, wherein the generating and receiving radiation beams are pulsed radiation beams;
a first signal conversion device arranged to receive a pulse of the generating radiation beam and configured to output a signal pulse in response to receiving a pulse of the generating radiation beam;
a second signal conversion device arranged to receive a pulse of the receiving radiation beam and configured to sample a signal pulse in response to receiving a pulse of the receiving radiation beam;
a transmission line arrangement configured to direct a signal pulse from the first signal conversion device to a device under test and to direct a signal pulse reflected from the device under test or transmitted through a device under test to the second signal conversion device; and
a direct-drive delay line positioned in the optical path of the generating radiation beam and/or the receiving radiation beam, the direct-drive delay line being configured to introduce an optical delay between the generating and receiving radiation beams such that a pulse of the generating radiation beam is incident on the first signal conversion device at a different time to a corresponding pulse of the receiving radiation beam being incident on the second signal conversion device;
wherein the direct-drive delay line comprises:
at least one reflector positioned in the optical path of the generating and/or receiving radiation beams; and
a synchronous linear motor configured to move the reflector so as to vary the optical path length of the generating and/or receiving radiation beams so as to vary the optical delay between the generating and receiving radiation beams.