| CPC G01N 24/006 (2013.01) [G01N 24/08 (2013.01)] | 9 Claims |

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1. A component analysis apparatus comprising:
a sensor configured to detect a nuclear magnetic field of a sample while being in contact with the sample;
an ozone generation device configured to generate ozone;
an oxygen radical generation device configured to decompose ozone to generate oxygen radicals, wherein
the sensor has an electron spin that causes electron spin resonance with a nuclear spin of the sample,
an orientation of the electron spin can be optically detected,
the ozone generation device and the oxygen radical generation device are driven during washing of the sensor;
microwave emitting device configured to emit a microwave to the sensor;
a magnet configured to apply a static magnetic field to the sensor;
a laser light source configured to irradiate the sensor with laser light used to read the orientation of the electron spin;
a lens configured to condense fluorescence emitted from the sensor when the sensor is irradiated with the laser light;
a detector configured to measure an intensity of the fluorescence;
a movable support member on which two or more pairs of the microwave emitting device and the sensor are placed, the two or more pairs including a first pair and a second pair; and
a controller configured to control the movable support member, the ozone generation device, and the oxygen radical generation device, wherein
the controller is configured to:
wash the first pair after moving the movable support member such that the first pair is disposed at a first position at which the washing is to be performed by the oxygen radicals; and
after the washing of the first pair is completed, move the movable support member such that the first pair is disposed at a second position at which component measurement by nuclear magnetic resonance is to be performed on the first pair, and move the movable support member such that the second pair is disposed at the first position.
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