US 12,392,740 B2
XPS sample holder, apparatus for X-ray photoelectron spectroscopy including the same and method for X-ray photoelectron spectroscopy using the same
Soohyung Park, Seoul (KR); NamHee Kwon, Seoul (KR); and Habin Kang, Seoul (KR)
Assigned to KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY, Seoul (KR)
Filed by KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY, Seoul (KR)
Filed on Jun. 26, 2023, as Appl. No. 18/341,606.
Claims priority of application No. 10-2022-0131318 (KR), filed on Oct. 13, 2022.
Prior Publication US 2024/0125716 A1, Apr. 18, 2024
Int. Cl. G01N 23/2204 (2018.01); G01N 23/2273 (2018.01)
CPC G01N 23/2204 (2013.01) [G01N 23/2273 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An X-ray photoelectron spectroscopy (XPS) sample holder comprising:
a holder body configured to provide an inner space;
a first voltage transmitting member that passes through a top surface of the holder body in a vertical direction;
a second voltage transmitting member that passes through the top surface of the holder body in the vertical direction and is spaced apart from the first voltage transmitting member in a first direction that is a horizontal direction;
an inner connection member disposed in the holder body and electrically connected to the first voltage transmitting member;
a first electrode part disposed on the top surface of the holder body and connected to the first voltage transmitting member; and
a second electrode part disposed on the top surface of the holder body and connected to the second voltage transmitting member,
wherein the first electrode part and the second electrode part are spaced apart from each other in the first direction.