US 12,392,673 B2
Composite structure for a pressure sensor and pressure sensor
Chee Keong Tee, Singapore (SG); Haicheng Yao, Singapore (SG); Pengju Li, Singapore (SG); and Wen Cheng, Singapore (SG)
Assigned to NATIONAL UNIVERSITY OF SINGAPORE, Singapore (SG)
Appl. No. 17/618,258
Filed by NATIONAL UNIVERSITY OF SINGAPORE, Singapore (SG)
PCT Filed Jun. 10, 2020, PCT No. PCT/SG2020/050325
§ 371(c)(1), (2) Date Dec. 10, 2021,
PCT Pub. No. WO2020/251473, PCT Pub. Date Dec. 17, 2020.
Claims priority of application No. 10201905267P (SG), filed on Jun. 10, 2019.
Prior Publication US 2022/0299385 A1, Sep. 22, 2022
Int. Cl. G01L 1/20 (2006.01); G01L 1/14 (2006.01); G01L 1/18 (2006.01); G01L 5/22 (2006.01)
CPC G01L 1/205 (2013.01) [G01L 1/146 (2013.01); G01L 1/18 (2013.01); G01L 5/228 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A composite structure for a pressure sensor, the composite structure comprising:
an array of microstructures made from an elastomeric material; and
a flexible conductive coating formed on the array of microstructures such that a surface morphology of the array of microstructures is substantially the same as for the coated array of the microstructures;
wherein the flexible conductive coating exhibits a Young's modulus that is higher than that of the elastomeric material;
wherein the flexible conductive coating comprises a low dimensional electronically active material formed on an intermediate uniform layer between the array of microstructures and the low dimensional electronically active material; and
the composite structure further comprising electrodes disposed on the coated array of microstructures and configured for measuring a change in contact resistance between the low dimensional electronically active material and the electrodes as a result of pressure on the composite structure.