US 12,392,566 B2
Frequency lock in active mems cooling systems
Ganapathy Sankar, Cupertino, CA (US); Shekhar Halakatti, Campbell, CA (US); Suchitra Ramesh, San Jose, CA (US); Suryaprakash Ganti, Los Altos, CA (US); Prabhu Sathyamurthy, San Jose, CA (US); and Seshagiri Rao Madhavapeddy, La Jolla, CA (US)
Assigned to Frore Systems Inc., San Jose, CA (US)
Filed by Frore Systems Inc., San Jose, CA (US)
Filed on Mar. 28, 2024, as Appl. No. 18/620,840.
Application 18/620,840 is a continuation of application No. 17/552,290, filed on Dec. 15, 2021, granted, now 11,976,892.
Claims priority of provisional application 63/128,376, filed on Dec. 21, 2020.
Claims priority of provisional application 63/126,461, filed on Dec. 16, 2020.
Prior Publication US 2024/0240884 A1, Jul. 18, 2024
Int. Cl. F28F 13/12 (2006.01); H10N 30/20 (2023.01); H10N 30/80 (2023.01)
CPC F28F 13/12 (2013.01) [H10N 30/2042 (2023.02); H10N 30/802 (2023.02)] 13 Claims
OG exemplary drawing
 
1. A system, comprising:
an active micro-electric mechanical system (MEMS) cooling system including at least one cooling element configured to direct a fluid to cool at least one heat-generating structure when driven to vibrate by a driving signal having a frequency and an input voltage, wherein the at least one cooling element has a first cantilevered region, a second cantilevered region, and a central region between the first cantilevered region and the second cantilevered region, the first cantilevered region and the second cantilevered region being configured to vibrate when driven; and
a drive system coupled to the active MEMS cooling system for providing the driving signal, the drive system including a power source for the driving signal and a feedback controller having a feedback signal corresponding to a proximity to a resonant state of the at least one cooling element, the drive system being configured to adjust at least one of the frequency and the input voltage based on the feedback signal such that the frequency and the input voltage correspond to the resonant state of the at least one cooling element, wherein the input voltage does not exceed a maximum safe operating voltage for the at least one cooling element.